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Dual-Target RF Magnetron Sputtering Coating Machine

Description

The Dual-Target Magnetron Sputtering Coating Equipment Is A Cost-Effective Magnetron Sputtering Coating Equipment Independently Developed By Our Company, Which Has The Characteristics Of Standardization, Modularization And Customization. Magnetron Targets Are Available In 1 Inch And 2 Inches, Customers Can Choose According To The Size Of The Plated Substrate; The Power Supply Is 300W RF Power Supply Plus 500W DC Power Supply, DC Power Supply Can Be Used For The Preparation Of Metal Film, RF Power Supply Can Be Used For Non-Metal For Film Preparation, Two Targets Can Meet The Needs Of Multi-Layer Or Multiple Coatings. If Customers Have Other Coating Needs, They Can Customize DC Power Supply And Pulse Power Supply. Various Types Of Power Supplies Are Available In Various Specifications From 300W To 1000W.

Sample StageSizeΦ185mmTemperature Control Accuracy±1℃
Heating TemperatureMax 500℃Rotate Speed1-20rpm Adjustable
Magnetron Sputtering   Target HeadQuantity2”×2 (1”,2” Optional)Water ChillerCirculating Water Chiller   With Flow Rate Of 10L/Min
Cooling ModeWater Cooling  
Vacuum ChamberChamber SizeΦ300mm×300mmWatch WindowΦ100mm
Chamber MaterialStainless SteelOpening ModeTop Cover Open
Mass Flowmeter2 Channels; Measuring Range 100sccm; 100sccm (Can Be Customized According To Customer Needs)
Vacuum SystemModelAME-GZK103-APumping InterfaceKF40
Molecular PumpCY-600Exhaust InterfaceKF16
Backing PumpRotary Vane PumpVacuum MeasurementCompound Vacuum Gauge
Ultimate Vacuum1.0E-5PaPower SupplyAC;220V 50/60Hz
Pumping RateMolecular Pump:   600L/S   Rotary Vane Pump: 1.1L/S  Comprehensive Gas Pumping Performance:   Vacuum Up To 1.0E-3Pa In 20 Minutes
Power ConfigurationQuantityRF Power Supply×2Max Output PowerRF 300 W
Other ParametersSupply VoltageAC220V,50HzOverall Size600mm×650mm×1280mm
Total Power2.5KWTotal WeightAbout 300kg
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