Description
This Product Is A Desktop Small Dual-Source Evaporation Coating Instrument. The Equipment Is Equipped With Two Sets Of Evaporation Sources. Each Evaporation Source Is Powered Separately, Which Can Be Turned On Alternately Or At The Same Time; Each Evaporation Source Can Provide Maximum 100A Coating Current, Maximum Evaporation The Temperature Can Reach 1800℃, Which Can Meet The Vapor Deposition Of Various Common Metals And Some Non-Metallic Vapor Deposition.
SPECIFICATIONS
| Model | AME-EVP180G-2S-LV |
| Power Supply | AC220V, 60Hz |
| Installation Conditions | 1. Use Environment Temperature 25℃±15℃, Humidity 55%Rh±10%Rh;2. Equipment Power Supply: AC220V, 50Hz, Must Be Well Grounded;3. Rated Power: 2500w;4. Equipment Gas: The Equipment Chamber Needs To Be Filled With Argon For Cleaning, And The Customer Needs To Prepare Argon, PureDegree ≥99.99%;5. The Size Of The Working Table Is 600mm×600mm×700mm, And The Load-Bearing Capacity Is More Than 70kg;6. Ventilation Is Required For Placement. |
| Technical Parameter | 1. Number Of Evaporation Sources: 2, Each Evaporation Source Is Equipped With Baffles;2. Evaporation Source Voltage: 10V3. Evaporation Current 0～100A Continuously Adjustable4. Equipped With 2 Tungsten Boats And 2 Tungsten Wire Baskets;5. Stainless Steel Rotating Upper Sample Stage With A Diameter Of 60mm;6. The Distance Between The Sample And The Evaporation Source Is 60～100mm Continuously Adjustable;7. The Vacuum Chamber Is A Stainless Steel Chamber With An Outer Diameter Of 170mm, An Inner Diameter Of 160mm, And A Height Of 210mm;8. The Pumping Interface Of The Vacuum Chamber Is KF40;9. The Air Inlet Interface Is A 1/4-Inch Double Ferrule Joint, And A Stainless Steel Fine-Tuning Valve Is Installed By Default To Adjust The Air Intake;10. The Display Is A 7-Inch Color Touch Screen;11. The Evaporation Current Can Be Adjusted, And The Evaporation Safety Current Value And Safe Vacuum Value Can Be Set;12. Safety Protection: The Evaporation Current Will Be Automatically Cut Off If The Vacuum Is Too Low;13. Ultimate Vacuum: 5×10-5Pa (With Molecular Pump);14. The Vacuum Measurement Is A Resistance Gauge Vacuum Gauge, And Its Range Is: 1～105Pa |
| Precautions | In Order To Give Full Play To The Vacuum Performance Of The Cavity, It Is Recommended To Use It With A Molecular Pump Set. |
| Max Power | 1200W |
| Evaporation Sources | Tungsten Wire Basket X2 |
| Vacuum Chamber | Material: High Purity Quartz Φ180mm X 210mm |
| Max Temp. | 1700℃ |
| Thermocouple | B Type |
| Vacuum Gauge | Resistance-Type Vacuum Gauge |
| Vacuum Interface | KF16 |
| Inlet Interface | 1/4NPS |
| Overall Dimensions | 500x350x400mm |
| Optional Accessories | |
| Thickness Monitor | 1. Film Thickness Resolution: 0.0136Å (Aluminum)2. Film Thickness Accuracy: ±0.5%, Depending On The Process Conditions, Especially The Position Of The Sensor, Material Stress, Temperature And Density3. Measuring Speed: 100ms-1s/Time, The Measuring Range Can Be Set: 500000Å (Aluminum)4. Standard Sensor Crystal: 6MHz5. Applicable Chip Frequency: 6MHz Applicable Chip Size: Φ14mm Mounting Flange: CF35 |
| Key Parameters | L Double Evaporation SourceL Rotating Sample StageL Evaporating Current 0-100AL Adjustable Distance Between Sample Stage And Evaporation SourceL With Molecular Pump Set, 5E-4PaL With Water Cooler |
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